X-ray photoelectron spectroscopic study of Ge2 Sb2 Te5 etched by fluorocarbon inductively coupled plasmas

S. K. Kang, J. S. Oh, B. J. Park, S. W. Kim, J. T. Lim, G. Y. Yeom, C. J. Kang, G. J. Min

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Biochemistry, Genetics and Molecular Biology

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