We demonstrate a WO3-MoS2 mixture-based gas sensor showing the response to NO2 and complete recovery in air at room temperature for the first time. When n-type WO3 and p-type MoS2 meet, a p-n junction with an electron depletion zone is formed at the interface due to the electron transfer induced by the difference in work function. This electron depletion zone prevents MoS2 from bonding directly with oxygen, thus preventing electrical instability in air that conventional MoS2-based sensors inevitably have and allowing them to respond and fully recover in air at room temperature. Here, unlike other MoS2-based sensors, the fabricated WO3-MoS2 mixture-based sensors showed complete recovery after exposure to NO2 in air at room temperature, which means that the fabricated sensor can be operated at low power without the heaters.
|Title of host publication||2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019|
|Publisher||Institute of Electrical and Electronics Engineers Inc.|
|Number of pages||4|
|Publication status||Published - 2019 Jan|
|Event||32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of|
Duration: 2019 Jan 27 → 2019 Jan 31
|Name||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|Conference||32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019|
|Country/Territory||Korea, Republic of|
|Period||19/1/27 → 19/1/31|
Bibliographical noteFunding Information:
This work was supported by the National Research Foundation of Korea(NRF) grant funded by the Korea government(MSIT)(No. NRF-2018R1A2A1A05023070).
© 2019 IEEE.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering