WO3-MoS2 Mixture-Based Gas Sensor for NO2 Detection at Room Temperature

Dae Hyun Baek; Gyujun Choi; Yeunjun Kwak; Byeong Hwa Cho; Jongbaeg Kim

doi:10.1109/MEMSYS.2019.8870680

WO₃-MoS₂ Mixture-Based Gas Sensor for NO₂ Detection at Room Temperature

Dae Hyun Baek, Gyujun Choi, Yeunjun Kwak, Byeong Hwa Cho, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

We demonstrate a WO₃-MoS₂ mixture-based gas sensor showing the response to NO₂ and complete recovery in air at room temperature for the first time. When n-type WO₃ and p-type MoS₂ meet, a p-n junction with an electron depletion zone is formed at the interface due to the electron transfer induced by the difference in work function. This electron depletion zone prevents MoS₂ from bonding directly with oxygen, thus preventing electrical instability in air that conventional MoS₂-based sensors inevitably have and allowing them to respond and fully recover in air at room temperature. Here, unlike other MoS₂-based sensors, the fabricated WO₃-MoS₂ mixture-based sensors showed complete recovery after exposure to NO₂ in air at room temperature, which means that the fabricated sensor can be operated at low power without the heaters.

Original language	English
Title of host publication	2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	468-471
Number of pages	4
ISBN (Electronic)	9781728116105
DOIs	https://doi.org/10.1109/MEMSYS.2019.8870680
Publication status	Published - 2019 Jan
Event	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of Duration: 2019 Jan 27 → 2019 Jan 31

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2019-January
ISSN (Print)	1084-6999

Conference

Conference	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country/Territory	Korea, Republic of
City	Seoul
Period	19/1/27 → 19/1/31

Bibliographical note

Funding Information:
This work was supported by the National Research Foundation of Korea(NRF) grant funded by the Korea government(MSIT)(No. NRF-2018R1A2A1A05023070).

Publisher Copyright:
© 2019 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2019.8870680

Cite this

Baek, D. H., Choi, G., Kwak, Y., Cho, B. H., & Kim, J. (2019). WO₃-MoS₂ Mixture-Based Gas Sensor for NO₂ Detection at Room Temperature. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 468-471). [8870680] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870680

Baek, Dae Hyun ; Choi, Gyujun ; Kwak, Yeunjun et al. / WO₃-MoS₂ Mixture-Based Gas Sensor for NO₂ Detection at Room Temperature. 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 468-471 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{11199a1a9e944096a19e94cd746727e7,

title = "WO3-MoS2 Mixture-Based Gas Sensor for NO2 Detection at Room Temperature",

abstract = "We demonstrate a WO3-MoS2 mixture-based gas sensor showing the response to NO2 and complete recovery in air at room temperature for the first time. When n-type WO3 and p-type MoS2 meet, a p-n junction with an electron depletion zone is formed at the interface due to the electron transfer induced by the difference in work function. This electron depletion zone prevents MoS2 from bonding directly with oxygen, thus preventing electrical instability in air that conventional MoS2-based sensors inevitably have and allowing them to respond and fully recover in air at room temperature. Here, unlike other MoS2-based sensors, the fabricated WO3-MoS2 mixture-based sensors showed complete recovery after exposure to NO2 in air at room temperature, which means that the fabricated sensor can be operated at low power without the heaters.",

author = "Baek, {Dae Hyun} and Gyujun Choi and Yeunjun Kwak and Cho, {Byeong Hwa} and Jongbaeg Kim",

note = "Funding Information: This work was supported by the National Research Foundation of Korea(NRF) grant funded by the Korea government(MSIT)(No. NRF-2018R1A2A1A05023070). Publisher Copyright: {\textcopyright} 2019 IEEE.; 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 ; Conference date: 27-01-2019 Through 31-01-2019",

year = "2019",

month = jan,

doi = "10.1109/MEMSYS.2019.8870680",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "468--471",

booktitle = "2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019",

address = "United States",

}

Baek, DH, Choi, G, Kwak, Y, Cho, BH & Kim, J 2019, WO₃-MoS₂ Mixture-Based Gas Sensor for NO₂ Detection at Room Temperature. in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019., 8870680, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2019-January, Institute of Electrical and Electronics Engineers Inc., pp. 468-471, 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019, Seoul, Korea, Republic of, 19/1/27. https://doi.org/10.1109/MEMSYS.2019.8870680

WO₃-MoS₂ Mixture-Based Gas Sensor for NO₂ Detection at Room Temperature. / Baek, Dae Hyun; Choi, Gyujun; Kwak, Yeunjun et al.
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 468-471 8870680 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - WO3-MoS2 Mixture-Based Gas Sensor for NO2 Detection at Room Temperature

AU - Baek, Dae Hyun

AU - Choi, Gyujun

AU - Kwak, Yeunjun

AU - Cho, Byeong Hwa

AU - Kim, Jongbaeg

N1 - Funding Information: This work was supported by the National Research Foundation of Korea(NRF) grant funded by the Korea government(MSIT)(No. NRF-2018R1A2A1A05023070). Publisher Copyright: © 2019 IEEE.

PY - 2019/1

Y1 - 2019/1

N2 - We demonstrate a WO3-MoS2 mixture-based gas sensor showing the response to NO2 and complete recovery in air at room temperature for the first time. When n-type WO3 and p-type MoS2 meet, a p-n junction with an electron depletion zone is formed at the interface due to the electron transfer induced by the difference in work function. This electron depletion zone prevents MoS2 from bonding directly with oxygen, thus preventing electrical instability in air that conventional MoS2-based sensors inevitably have and allowing them to respond and fully recover in air at room temperature. Here, unlike other MoS2-based sensors, the fabricated WO3-MoS2 mixture-based sensors showed complete recovery after exposure to NO2 in air at room temperature, which means that the fabricated sensor can be operated at low power without the heaters.

AB - We demonstrate a WO3-MoS2 mixture-based gas sensor showing the response to NO2 and complete recovery in air at room temperature for the first time. When n-type WO3 and p-type MoS2 meet, a p-n junction with an electron depletion zone is formed at the interface due to the electron transfer induced by the difference in work function. This electron depletion zone prevents MoS2 from bonding directly with oxygen, thus preventing electrical instability in air that conventional MoS2-based sensors inevitably have and allowing them to respond and fully recover in air at room temperature. Here, unlike other MoS2-based sensors, the fabricated WO3-MoS2 mixture-based sensors showed complete recovery after exposure to NO2 in air at room temperature, which means that the fabricated sensor can be operated at low power without the heaters.

UR - http://www.scopus.com/inward/record.url?scp=85074347429&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85074347429&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2019.8870680

DO - 10.1109/MEMSYS.2019.8870680

M3 - Conference contribution

AN - SCOPUS:85074347429

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 468

EP - 471

BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019

Y2 - 27 January 2019 through 31 January 2019

ER -

Baek DH, Choi G, Kwak Y, Cho BH, Kim J. WO₃-MoS₂ Mixture-Based Gas Sensor for NO₂ Detection at Room Temperature. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 468-471. 8870680. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2019.8870680