Uniform and simultaneous fabrication of high-precision and high-density density orifice, channel, and reservoirs for inkjet printheads

Jun Bo Yoon; Jae Duk Lee; Chul Hi Han; Euisik Yoon; Choong Ki Kim

doi:10.1117/12.324304

Uniform and simultaneous fabrication of high-precision and high-density density orifice, channel, and reservoirs for inkjet printheads

Jun Bo Yoon, Jae Duk Lee, Chul Hi Han, Euisik Yoon, Choong Ki Kim

Yonsei Advanced Science Institute

Research output: Contribution to journal › Conference article › peer-review

Abstract

We have fabricated a unified Orifice Plate Assembly (OPA) for high-resolution inkjet printheads, which has orifices, ink flow channels, and reservoirs three-dimensionally in a single body, using single-step 3D photolithography followed by single-step electroplating. These three components are the core in inkjet printheads because they determine almost all of ink fluidics, especially the size and trajectory of an ink drop. Therefore, for high-resolution beyond 600dpi, a unified and high-precision orifice plate assembly is strongly needed.

Original language	English
Pages (from-to)	214-224
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3511
DOIs	https://doi.org/10.1117/12.324304
Publication status	Published - 1998
Event	Micromachining and Microfabrication Process Technology IV - Santa Clara, CA, United States Duration: 1998 Sept 21 → 1998 Sept 22

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.324304

Cite this

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title = "Uniform and simultaneous fabrication of high-precision and high-density density orifice, channel, and reservoirs for inkjet printheads",

abstract = "We have fabricated a unified Orifice Plate Assembly (OPA) for high-resolution inkjet printheads, which has orifices, ink flow channels, and reservoirs three-dimensionally in a single body, using single-step 3D photolithography followed by single-step electroplating. These three components are the core in inkjet printheads because they determine almost all of ink fluidics, especially the size and trajectory of an ink drop. Therefore, for high-resolution beyond 600dpi, a unified and high-precision orifice plate assembly is strongly needed.",

author = "Yoon, {Jun Bo} and Lee, {Jae Duk} and Han, {Chul Hi} and Euisik Yoon and Kim, {Choong Ki}",

year = "1998",

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language = "English",

volume = "3511",

pages = "214--224",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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publisher = "SPIE",

note = "Micromachining and Microfabrication Process Technology IV ; Conference date: 21-09-1998 Through 22-09-1998",

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Uniform and simultaneous fabrication of high-precision and high-density density orifice, channel, and reservoirs for inkjet printheads. / Yoon, Jun Bo; Lee, Jae Duk; Han, Chul Hi et al.
In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3511, 1998, p. 214-224.

Research output: Contribution to journal › Conference article › peer-review

TY - JOUR

T1 - Uniform and simultaneous fabrication of high-precision and high-density density orifice, channel, and reservoirs for inkjet printheads

AU - Yoon, Jun Bo

AU - Lee, Jae Duk

AU - Han, Chul Hi

AU - Yoon, Euisik

AU - Kim, Choong Ki

PY - 1998

Y1 - 1998

N2 - We have fabricated a unified Orifice Plate Assembly (OPA) for high-resolution inkjet printheads, which has orifices, ink flow channels, and reservoirs three-dimensionally in a single body, using single-step 3D photolithography followed by single-step electroplating. These three components are the core in inkjet printheads because they determine almost all of ink fluidics, especially the size and trajectory of an ink drop. Therefore, for high-resolution beyond 600dpi, a unified and high-precision orifice plate assembly is strongly needed.

AB - We have fabricated a unified Orifice Plate Assembly (OPA) for high-resolution inkjet printheads, which has orifices, ink flow channels, and reservoirs three-dimensionally in a single body, using single-step 3D photolithography followed by single-step electroplating. These three components are the core in inkjet printheads because they determine almost all of ink fluidics, especially the size and trajectory of an ink drop. Therefore, for high-resolution beyond 600dpi, a unified and high-precision orifice plate assembly is strongly needed.

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JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Micromachining and Microfabrication Process Technology IV

Y2 - 21 September 1998 through 22 September 1998

ER -

Uniform and simultaneous fabrication of high-precision and high-density density orifice, channel, and reservoirs for inkjet printheads

Abstract

All Science Journal Classification (ASJC) codes

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