@inproceedings{59c091f5352b48b8ae476236537fc606,
title = "Uncertainty analysis on optical testing with a Shack-Hartmann sensor and a point source",
abstract = "In this study, we analyze the uncertainty in an optical testing system using a Shack-Hartmann sensor for a wavefront measurement device. The main uncertainty sources of the optical testing system are the electrical noise of the ShackHartmann sensor and the wavefront deformation due to the image relay optics and the pinhole source. Using a homemade high-precision plane-wave source as a reference, we calibrate the optics of the system and the ShackHartmann sensor itself. It is found that that the error due to the image relay optics installed between the test lens and the Shack-Hartmann sensor is 0.030 λ (RMS). By warming up the Shack-Hartmann sensor for about 1 hour, the measurement values are stabilized to within 0.001 λ (RMS). After calibrating the optical testing system with the reference source, overall uncertainty in the optical testing system is reduced to 0.009 λ (RMS). Performance of the optical testing system is evaluated by measuring the wavefront errors of various optical components, such as a numerical aperture (NA) 0.25 aspheric lens and a digital video disc (DVD) pick up lens.",
author = "Kang, {Dong Won} and Lee, {Jin Seok} and Yang, {Ho Soon} and Hahn, {Jae Won}",
year = "2008",
doi = "10.1117/12.762505",
language = "English",
isbn = "9780819470591",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII",
note = "Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII ; Conference date: 21-01-2008 Through 22-01-2008",
}