Ultrafine particle counter using a MEMS-based particle processing chip

Hong Lae Kim; Jang Seop Han; Sang Myun Lee; Hong Bum Kwon; Jungho Hwang; Yong Jun Kim

doi:10.1109/MEMSYS.2015.7051016

Ultrafine particle counter using a MEMS-based particle processing chip

Hong Lae Kim, Jang Seop Han, Sang Myun Lee, Hong Bum Kwon, Jungho Hwang, Yong Jun Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

7 Citations (Scopus)

Abstract

This paper reports on the full realization of an ultrafine particle monitoring system, including a MEMS-based particle processing chip and signal processing circuits. Unlike a conventional liquid-based microfluidic chip, the proposed particle processing chip handles a mixture of gas and particles. The proposed particle monitoring system is suitable for routine ambient air monitoring due to its small size, ease of use and low cost. The detection performance of the proposed system was evaluated through measurements of particle number concentration and compared with that of commercial instrument.

Original language	English
Title of host publication	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	559-562
Number of pages	4
Edition	February
ISBN (Electronic)	9781479979554
DOIs	https://doi.org/10.1109/MEMSYS.2015.7051016
Publication status	Published - 2015 Feb 26
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 2015 Jan 18 → 2015 Jan 22

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Number	February
Volume	2015-February
ISSN (Print)	1084-6999

Other

Other	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
Country/Territory	Portugal
City	Estoril
Period	15/1/18 → 15/1/22

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2015.7051016

Cite this

Kim, H. L., Han, J. S., Lee, S. M., Kwon, H. B., Hwang, J., & Kim, Y. J. (2015). Ultrafine particle counter using a MEMS-based particle processing chip. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 559-562). [7051016] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7051016

Kim, Hong Lae ; Han, Jang Seop ; Lee, Sang Myun et al. / Ultrafine particle counter using a MEMS-based particle processing chip. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 559-562 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

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title = "Ultrafine particle counter using a MEMS-based particle processing chip",

abstract = "This paper reports on the full realization of an ultrafine particle monitoring system, including a MEMS-based particle processing chip and signal processing circuits. Unlike a conventional liquid-based microfluidic chip, the proposed particle processing chip handles a mixture of gas and particles. The proposed particle monitoring system is suitable for routine ambient air monitoring due to its small size, ease of use and low cost. The detection performance of the proposed system was evaluated through measurements of particle number concentration and compared with that of commercial instrument.",

author = "Kim, {Hong Lae} and Han, {Jang Seop} and Lee, {Sang Myun} and Kwon, {Hong Bum} and Jungho Hwang and Kim, {Yong Jun}",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 ; Conference date: 18-01-2015 Through 22-01-2015",

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Kim, HL, Han, JS, Lee, SM, Kwon, HB, Hwang, J & Kim, YJ 2015, Ultrafine particle counter using a MEMS-based particle processing chip. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7051016, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 559-562, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 15/1/18. https://doi.org/10.1109/MEMSYS.2015.7051016

Ultrafine particle counter using a MEMS-based particle processing chip. / Kim, Hong Lae; Han, Jang Seop; Lee, Sang Myun et al.
2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 559-562 7051016 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Kwon, Hong Bum

AU - Hwang, Jungho

AU - Kim, Yong Jun

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N2 - This paper reports on the full realization of an ultrafine particle monitoring system, including a MEMS-based particle processing chip and signal processing circuits. Unlike a conventional liquid-based microfluidic chip, the proposed particle processing chip handles a mixture of gas and particles. The proposed particle monitoring system is suitable for routine ambient air monitoring due to its small size, ease of use and low cost. The detection performance of the proposed system was evaluated through measurements of particle number concentration and compared with that of commercial instrument.

AB - This paper reports on the full realization of an ultrafine particle monitoring system, including a MEMS-based particle processing chip and signal processing circuits. Unlike a conventional liquid-based microfluidic chip, the proposed particle processing chip handles a mixture of gas and particles. The proposed particle monitoring system is suitable for routine ambient air monitoring due to its small size, ease of use and low cost. The detection performance of the proposed system was evaluated through measurements of particle number concentration and compared with that of commercial instrument.

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M3 - Conference contribution

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BT - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

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ER -

Kim HL, Han JS, Lee SM, Kwon HB, Hwang J , Kim YJ. Ultrafine particle counter using a MEMS-based particle processing chip. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 559-562. 7051016. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7051016

Ultrafine particle counter using a MEMS-based particle processing chip

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