Twyman-Green interferometer using virtual optics for eliminating reference wave

Cheol Ki Min, Sungbin Jeon, Hyungbae Moon, Kyoung Su Park, No Cheol Park, Hyunseok Yang, Young Pil Park

Research output: Contribution to journalArticlepeer-review


The Twyman-Green (TG) interferometer is widely used to evaluate optical imaging systems. It consists of an object wave and a reference wave for creating an interferogram. In this paper, we propose a simple interferometer that eliminates the actual reference wave. Instead of the piezoelectric trasnducer mirror used in the reference wave, a virtual optics was used via a numerical simulation of plane-wave illumination. A solid immersion lens of NA = 1.84 is described and fabricated for evaluating an interferogram. To verify the proposed method, the resulting interferogram with the aberration analysis was compared with those obtained using a conventional TG interferometer. The total wavefront aberration value was measured about 21 mλRMS and the difference between the conventional and proposed methods was approximately 3 %. Phase-shifting interferometry without mechanical and optical disturbances was demonstrated.

Original languageEnglish
Pages (from-to)1505-1511
Number of pages7
JournalMicrosystem Technologies
Issue number9-10
Publication statusPublished - 2013 Sept

Bibliographical note

Funding Information:
This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education, Science and Technology (2013-027254).

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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