Tuning the spring constant of cantilever-free tip arrays

Daniel J. Eichelsdoerfer; Keith A. Brown; Radha Boya; Wooyoung Shim; Chad A. Mirkin

doi:10.1021/nl304268u

Tuning the spring constant of cantilever-free tip arrays

Daniel J. Eichelsdoerfer, Keith A. Brown, Radha Boya, Wooyoung Shim, Chad A. Mirkin

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

Abstract

A method to measure and tune the spring constant of tips in a cantilever-free array by adjusting the mechanical properties of the elastomeric layer on which it is based is reported. Using this technique, large-area silicon tip arrays are fabricated with spring constants tuned ranging from 7 to 150 N/m. To illustrate the benefit of utilizing a lower spring constant array, the ability to pattern on a delicate 50 nm silicon nitride substrate is explored.

Original language	English
Pages (from-to)	664-667
Number of pages	4
Journal	Nano letters
Volume	13
Issue number	2
DOIs	https://doi.org/10.1021/nl304268u
Publication status	Published - 2013 Feb 13

All Science Journal Classification (ASJC) codes

Bioengineering
Chemistry(all)
Materials Science(all)
Condensed Matter Physics
Mechanical Engineering

Access to Document

10.1021/nl304268u

Cite this

@article{29249897a67b442d9b5400e82ad284c6,

title = "Tuning the spring constant of cantilever-free tip arrays",

abstract = "A method to measure and tune the spring constant of tips in a cantilever-free array by adjusting the mechanical properties of the elastomeric layer on which it is based is reported. Using this technique, large-area silicon tip arrays are fabricated with spring constants tuned ranging from 7 to 150 N/m. To illustrate the benefit of utilizing a lower spring constant array, the ability to pattern on a delicate 50 nm silicon nitride substrate is explored.",

author = "Eichelsdoerfer, {Daniel J.} and Brown, {Keith A.} and Radha Boya and Wooyoung Shim and Mirkin, {Chad A.}",

year = "2013",

month = feb,

day = "13",

doi = "10.1021/nl304268u",

language = "English",

volume = "13",

pages = "664--667",

journal = "Nano Letters",

issn = "1530-6984",

publisher = "American Chemical Society",

number = "2",

}

TY - JOUR

T1 - Tuning the spring constant of cantilever-free tip arrays

AU - Eichelsdoerfer, Daniel J.

AU - Brown, Keith A.

AU - Boya, Radha

AU - Shim, Wooyoung

AU - Mirkin, Chad A.

PY - 2013/2/13

Y1 - 2013/2/13

N2 - A method to measure and tune the spring constant of tips in a cantilever-free array by adjusting the mechanical properties of the elastomeric layer on which it is based is reported. Using this technique, large-area silicon tip arrays are fabricated with spring constants tuned ranging from 7 to 150 N/m. To illustrate the benefit of utilizing a lower spring constant array, the ability to pattern on a delicate 50 nm silicon nitride substrate is explored.

AB - A method to measure and tune the spring constant of tips in a cantilever-free array by adjusting the mechanical properties of the elastomeric layer on which it is based is reported. Using this technique, large-area silicon tip arrays are fabricated with spring constants tuned ranging from 7 to 150 N/m. To illustrate the benefit of utilizing a lower spring constant array, the ability to pattern on a delicate 50 nm silicon nitride substrate is explored.

UR - http://www.scopus.com/inward/record.url?scp=84873680997&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84873680997&partnerID=8YFLogxK

U2 - 10.1021/nl304268u

DO - 10.1021/nl304268u

M3 - Article

C2 - 23286875

AN - SCOPUS:84873680997

SN - 1530-6984

VL - 13

SP - 664

EP - 667

JO - Nano Letters

JF - Nano Letters

IS - 2

ER -

Tuning the spring constant of cantilever-free tip arrays

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this