Abstract
Trap density of states (DOS) for two amorphous-InGaZnO thin-film transistors are measured by photoexcited charge-collection spectroscopy (PECCS); free charges trapped at a certain energy level are liberated by the corresponding energetic photons and then electrically collected at the source/drain electrodes. During this photoelectric process, the threshold voltage of TFT shifts and its magnitude provides the DOS information of charge traps. According to the PECCS analysis, the TFT with a channel deposited under high sputtering power appeared more stable than the other device prepared with low sputtering power, showing even less than ∼10-10cm -2 as its totally integrated trap density.
Original language | English |
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Article number | 5708165 |
Pages (from-to) | 336-338 |
Number of pages | 3 |
Journal | IEEE Electron Device Letters |
Volume | 32 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2011 Mar |
Bibliographical note
Funding Information:Manuscript received December 7, 2010; accepted December 18, 2010. Date of publication February 4, 2011; date of current version February 23, 2011. This work was supported in part by KOSEF (NRL program, Grant 2010-8-0092), BK21 Project. The review of this letter was arranged by Editor W. T. Ng.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering