Tin-doped indium oxide films for highly flexible transparent conducting electrodes

Hee Jung Park, Joohee Kim, Jong Han Won, Gyoung Soon Choi, Yun Tak Lim, Jae Soo Shin, Jang Ung Park

Research output: Contribution to journalArticlepeer-review

24 Citations (Scopus)


With the recent growing interest in flexible electronics, many studies are being conducted on flexible transparent conducting electrodes (TCE) such as Ag nanowires, Ag nanomeshes, carbon nanotubes, and graphenes. However, it will take time for such technologies to replace Sn-doped In2O3 (ITO), which is now widely used, due to challenges with reliability, mass-production, cost, and industry infrastructure. In this study, ITO films with different thicknesses were deposited on a flexible polymer substrate to investigate their optical and electrical properties and flexibility as a function of film thickness. Regardless of thickness, the ITO films' transmittance was about 80% at ~ 550 nm wavelength. The sheet resistances of all films were below 100 Ω/sq although resistance increased with decreasing film thickness. As a result of bending tests, it was found that thinner films had a higher threshold against bending strain. The sheet resistances did not significantly change above a bending radius of ~ 5 mm. In particular, the 50 nm-thick ITO film endured to a bending radius of ~ 3 mm, showing that it is a viable transparent electrode for flexible optoelectronics.

Original languageEnglish
Pages (from-to)8-12
Number of pages5
JournalThin Solid Films
Publication statusPublished - 2016 Sept 30

Bibliographical note

Publisher Copyright:
© 2016

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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