Abstract
A 270nm thick Al2O3+x gate dielectric deposited on indium tin oxide glass was used to construct the pentacene-based organic thin-film transistors (OTFT). Two different deposition techniques, traditional thermal evaporation (TE) and energetic cluster evaporation (ECE), were used for the investigation. The TE-depsoited pentacene channel appeared superior to the ECE-deposited pentacene in regard to hole mobility and crystallinity. However, the ECE-prepared OTFT show a threshold voltage shift which is more prominent with proper chemical treatment on the surface of Al2O3+x gate oxide.
Original language | English |
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Pages (from-to) | 2301-2304 |
Number of pages | 4 |
Journal | Journal of Applied Physics |
Volume | 96 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2004 Aug 15 |
Bibliographical note
Funding Information:The authors acknowledge the financial support from KISTEP (Grant No. M1-0214-00-0228) and the BK 21 Program. J.H.K. acknowledges support from eSSC at Postech funded by KOSEF.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)