Three dimensional measurement of micro-optical components using digital holography and pattern recognition

This paper proposes a method for inspecting transparent micro-optical components that combines digital holography and pattern recognition. As many micro-optical components have array structures with numerous elements, the uniformity of each element is important. Consequently, an effective inspection requires simultaneous measurement of these elements. Pattern recognition is used to solve this issue and can be adopted effectively using the unique characteristics of digital holography to obtain both amplitude and phase information on the object. To verify this approach, an experimental demonstration was performed with a micro-lens array using a circle-detection algorithm based on the Hough Transform. As an experimental results 30 micro-lenses are detected and measured simultaneously by using proposed inspection method.