Thin film supercapacitors using a sputtered RuO2 electrode

Jae Hong Lim, Doo Jin Choi, Han Ki Kim, Won I.I. Cho, Young Soo Yoon

Research output: Contribution to journalArticlepeer-review

69 Citations (Scopus)


An all solid-state thin film supercapacitor (TFSC) was fabricated with an amorphous ruthenium oxide (RuO2) thin film electrode and an amorphous LixPOyNz (Lipon) thin film electrolyte. The electrochemical behavior of the RuO2/Lipon/RuO2 /Pt TFSC was characterized by a charge-discharge technique in the potential range of 0-2 V. The RuO2/Lipon/RuO2/Pt TFSC exhibited a behavior of a bulk-type supercapacitor, even though the capacity of an as-fabricated TFSC was found to be much lower than the bulk one and showed a rapid decrease in capacity. This can be explained by excess oxygen ions and interfacial structure modification. The discharge yield dropped by 53% after 500 cycles. The capacitance per volume of the RuO2/Lipon/RuO2 /Pt TFSC at the first cycle is 38 mF/cm2 μm.

Original languageEnglish
Pages (from-to)A275-A278
JournalJournal of the Electrochemical Society
Issue number3
Publication statusPublished - 2001

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Materials Chemistry
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Renewable Energy, Sustainability and the Environment


Dive into the research topics of 'Thin film supercapacitors using a sputtered RuO2 electrode'. Together they form a unique fingerprint.

Cite this