Thin film supercapacitors using a sputtered RuO2 electrode

Jae Hong Lim; Doo Jin Choi; Han Ki Kim; Won I.I. Cho; Young Soo Yoon

doi:10.1149/1.1350666

Thin film supercapacitors using a sputtered RuO₂ electrode

Jae Hong Lim, Doo Jin Choi, Han Ki Kim, Won I.I. Cho, Young Soo Yoon

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

69 Citations (Scopus)

Abstract

An all solid-state thin film supercapacitor (TFSC) was fabricated with an amorphous ruthenium oxide (RuO₂) thin film electrode and an amorphous Li_xPO_yN_z (Lipon) thin film electrolyte. The electrochemical behavior of the RuO₂/Lipon/RuO₂ /Pt TFSC was characterized by a charge-discharge technique in the potential range of 0-2 V. The RuO₂/Lipon/RuO₂/Pt TFSC exhibited a behavior of a bulk-type supercapacitor, even though the capacity of an as-fabricated TFSC was found to be much lower than the bulk one and showed a rapid decrease in capacity. This can be explained by excess oxygen ions and interfacial structure modification. The discharge yield dropped by 53% after 500 cycles. The capacitance per volume of the RuO₂/Lipon/RuO₂ /Pt TFSC at the first cycle is 38 mF/cm² μm.

Original language	English
Pages (from-to)	A275-A278
Journal	Journal of the Electrochemical Society
Volume	148
Issue number	3
DOIs	https://doi.org/10.1149/1.1350666
Publication status	Published - 2001

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Materials Chemistry
Surfaces, Coatings and Films
Electrochemistry
Renewable Energy, Sustainability and the Environment

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1149/1.1350666

Cite this

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title = "Thin film supercapacitors using a sputtered RuO2 electrode",

abstract = "An all solid-state thin film supercapacitor (TFSC) was fabricated with an amorphous ruthenium oxide (RuO2) thin film electrode and an amorphous LixPOyNz (Lipon) thin film electrolyte. The electrochemical behavior of the RuO2/Lipon/RuO2 /Pt TFSC was characterized by a charge-discharge technique in the potential range of 0-2 V. The RuO2/Lipon/RuO2/Pt TFSC exhibited a behavior of a bulk-type supercapacitor, even though the capacity of an as-fabricated TFSC was found to be much lower than the bulk one and showed a rapid decrease in capacity. This can be explained by excess oxygen ions and interfacial structure modification. The discharge yield dropped by 53% after 500 cycles. The capacitance per volume of the RuO2/Lipon/RuO2 /Pt TFSC at the first cycle is 38 mF/cm2 μm.",

author = "Lim, {Jae Hong} and Choi, {Doo Jin} and Kim, {Han Ki} and Cho, {Won I.I.} and Yoon, {Young Soo}",

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T1 - Thin film supercapacitors using a sputtered RuO2 electrode

AU - Lim, Jae Hong

AU - Choi, Doo Jin

AU - Kim, Han Ki

AU - Cho, Won I.I.

AU - Yoon, Young Soo

PY - 2001

Y1 - 2001

N2 - An all solid-state thin film supercapacitor (TFSC) was fabricated with an amorphous ruthenium oxide (RuO2) thin film electrode and an amorphous LixPOyNz (Lipon) thin film electrolyte. The electrochemical behavior of the RuO2/Lipon/RuO2 /Pt TFSC was characterized by a charge-discharge technique in the potential range of 0-2 V. The RuO2/Lipon/RuO2/Pt TFSC exhibited a behavior of a bulk-type supercapacitor, even though the capacity of an as-fabricated TFSC was found to be much lower than the bulk one and showed a rapid decrease in capacity. This can be explained by excess oxygen ions and interfacial structure modification. The discharge yield dropped by 53% after 500 cycles. The capacitance per volume of the RuO2/Lipon/RuO2 /Pt TFSC at the first cycle is 38 mF/cm2 μm.

AB - An all solid-state thin film supercapacitor (TFSC) was fabricated with an amorphous ruthenium oxide (RuO2) thin film electrode and an amorphous LixPOyNz (Lipon) thin film electrolyte. The electrochemical behavior of the RuO2/Lipon/RuO2 /Pt TFSC was characterized by a charge-discharge technique in the potential range of 0-2 V. The RuO2/Lipon/RuO2/Pt TFSC exhibited a behavior of a bulk-type supercapacitor, even though the capacity of an as-fabricated TFSC was found to be much lower than the bulk one and showed a rapid decrease in capacity. This can be explained by excess oxygen ions and interfacial structure modification. The discharge yield dropped by 53% after 500 cycles. The capacitance per volume of the RuO2/Lipon/RuO2 /Pt TFSC at the first cycle is 38 mF/cm2 μm.

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