Thermophoretic deposition of palladium aerosol nanoparticles for electroless micropatterning of copper

Jeong Hoon Byeon; Ki Young Yoon; Yee Kyeong Jung; Jungho Hwang

doi:10.1016/j.elecom.2008.06.025

Thermophoretic deposition of palladium aerosol nanoparticles for electroless micropatterning of copper

Jeong Hoon Byeon, Ki Young Yoon, Yee Kyeong Jung, Jungho Hwang

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

A method for catalytic activation was introduced by producing palladium aerosol nanoparticles via spark generation and then thermophoretically depositing the particles onto a flexible polyimide substrate through a hole in pattern mask, resulting in a line (24 μm in width) and a square (136 μm × 136 μm) patterns. After annealing, the catalytically activated substrate was placed into a solution for electroless copper deposition. Finally, copper micropatterns of a line (35 μm in width) and a square (165 μm × 165 μm) were formed only on the activated regions of the substrate. Both patterns had the height of 1.6 μm.

Original language	English
Pages (from-to)	1272-1275
Number of pages	4
Journal	Electrochemistry Communications
Volume	10
Issue number	9
DOIs	https://doi.org/10.1016/j.elecom.2008.06.025
Publication status	Published - 2008 Sept

Bibliographical note

Funding Information:
This study was supported by the Industrial Technology Development Project from the Ministry of Knowledge Economy.

All Science Journal Classification (ASJC) codes

Electrochemistry

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10.1016/j.elecom.2008.06.025

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title = "Thermophoretic deposition of palladium aerosol nanoparticles for electroless micropatterning of copper",

abstract = "A method for catalytic activation was introduced by producing palladium aerosol nanoparticles via spark generation and then thermophoretically depositing the particles onto a flexible polyimide substrate through a hole in pattern mask, resulting in a line (24 μm in width) and a square (136 μm × 136 μm) patterns. After annealing, the catalytically activated substrate was placed into a solution for electroless copper deposition. Finally, copper micropatterns of a line (35 μm in width) and a square (165 μm × 165 μm) were formed only on the activated regions of the substrate. Both patterns had the height of 1.6 μm.",

author = "Byeon, {Jeong Hoon} and Yoon, {Ki Young} and Jung, {Yee Kyeong} and Jungho Hwang",

note = "Funding Information: This study was supported by the Industrial Technology Development Project from the Ministry of Knowledge Economy.",

year = "2008",

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AU - Byeon, Jeong Hoon

AU - Yoon, Ki Young

AU - Jung, Yee Kyeong

AU - Hwang, Jungho

N1 - Funding Information: This study was supported by the Industrial Technology Development Project from the Ministry of Knowledge Economy.

PY - 2008/9

Y1 - 2008/9

N2 - A method for catalytic activation was introduced by producing palladium aerosol nanoparticles via spark generation and then thermophoretically depositing the particles onto a flexible polyimide substrate through a hole in pattern mask, resulting in a line (24 μm in width) and a square (136 μm × 136 μm) patterns. After annealing, the catalytically activated substrate was placed into a solution for electroless copper deposition. Finally, copper micropatterns of a line (35 μm in width) and a square (165 μm × 165 μm) were formed only on the activated regions of the substrate. Both patterns had the height of 1.6 μm.

AB - A method for catalytic activation was introduced by producing palladium aerosol nanoparticles via spark generation and then thermophoretically depositing the particles onto a flexible polyimide substrate through a hole in pattern mask, resulting in a line (24 μm in width) and a square (136 μm × 136 μm) patterns. After annealing, the catalytically activated substrate was placed into a solution for electroless copper deposition. Finally, copper micropatterns of a line (35 μm in width) and a square (165 μm × 165 μm) were formed only on the activated regions of the substrate. Both patterns had the height of 1.6 μm.

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JO - Electrochemistry Communications

JF - Electrochemistry Communications

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ER -

Thermophoretic deposition of palladium aerosol nanoparticles for electroless micropatterning of copper

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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