TY - GEN
T1 - Thermally driven bimorph nano actuators fabricated using Focused ion beam chemical vapor deposition
AU - Chang, Jiyoung
AU - Kim, Jongbaeg
AU - Min, Byung Kwon
AU - Lin, Liwei
PY - 2007
Y1 - 2007
N2 - Bimorph nano actuator fabricated with Focused ion beam chemical vapor deposition (FIB-CVD) on MEMS heater is presented. The nano bimorph structure is composed of C14H10 and W(CO)6 and the transferred thermal energy generated from the MEMS heater increases bimorph temperature. Due to the thermal strain mismatch of the two materials, C and W, the nano bimorph bends toward C indicating larger CTE of tungsten containing material. The measured stroke is 600nm projected from top and bimorph actuation is repeated for over 100 times without any indication of degradation of failure under controlled input voltage. Relation between measured stroke, difference in coefficient of thermal expansion (CTE) and temperature rise is derived using Denavit - Hartenberg notation and bimorph structure analysis. ΔCTE is calculated to be 1.87 × 10-6K-1, which is necessary value to design the presented type nano bimorph actuators with different geometry/dimension and to predict their operational conditions and expected performance.
AB - Bimorph nano actuator fabricated with Focused ion beam chemical vapor deposition (FIB-CVD) on MEMS heater is presented. The nano bimorph structure is composed of C14H10 and W(CO)6 and the transferred thermal energy generated from the MEMS heater increases bimorph temperature. Due to the thermal strain mismatch of the two materials, C and W, the nano bimorph bends toward C indicating larger CTE of tungsten containing material. The measured stroke is 600nm projected from top and bimorph actuation is repeated for over 100 times without any indication of degradation of failure under controlled input voltage. Relation between measured stroke, difference in coefficient of thermal expansion (CTE) and temperature rise is derived using Denavit - Hartenberg notation and bimorph structure analysis. ΔCTE is calculated to be 1.87 × 10-6K-1, which is necessary value to design the presented type nano bimorph actuators with different geometry/dimension and to predict their operational conditions and expected performance.
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U2 - 10.1109/SENSOR.2007.4300187
DO - 10.1109/SENSOR.2007.4300187
M3 - Conference contribution
AN - SCOPUS:50049133448
SN - 1424408423
SN - 9781424408429
T3 - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 541
EP - 544
BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Y2 - 10 June 2007 through 14 June 2007
ER -