Diamond-like carbon (DLC) films were deposited using pulsed laser ablation of graphite target. The deposition process was performed with the change of laser energy density from 8 to 17 J/cm 2. Collected from analytical results, laser energy density is seen to play an important role in the formation of sp 3 carbon bondings in films. Also, the optimal deposition condition for DLC film was proposed and correlated with the laser energy density.
|Journal||Journal of the Korean Physical Society|
|Issue number||SUPPL. 2|
|Publication status||Published - 1998|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)