The correlation between the laser energy density and the properties of diamond-like carbon films with Nd:YAG (355 nm) excimer laser

Hae Suk Jung; Hyung Ho Park; Seong Sik Pang; Sang Yeol Lee

The correlation between the laser energy density and the properties of diamond-like carbon films with Nd:YAG (355 nm) excimer laser

Hae Suk Jung, Hyung Ho Park, Seong Sik Pang, Sang Yeol Lee

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Diamond-like carbon (DLC) films were deposited using pulsed laser ablation of graphite target. The deposition process was performed with the change of laser energy density from 8 to 17 J/cm ². Collected from analytical results, laser energy density is seen to play an important role in the formation of sp ³ carbon bondings in films. Also, the optimal deposition condition for DLC film was proposed and correlated with the laser energy density.

Original language	English
Pages (from-to)	S423-S426
Journal	Journal of the Korean Physical Society
Volume	33
Issue number	SUPPL. 2
Publication status	Published - 1998

All Science Journal Classification (ASJC) codes

Physics and Astronomy(all)

Cite this

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title = "The correlation between the laser energy density and the properties of diamond-like carbon films with Nd:YAG (355 nm) excimer laser",

abstract = "Diamond-like carbon (DLC) films were deposited using pulsed laser ablation of graphite target. The deposition process was performed with the change of laser energy density from 8 to 17 J/cm 2. Collected from analytical results, laser energy density is seen to play an important role in the formation of sp 3 carbon bondings in films. Also, the optimal deposition condition for DLC film was proposed and correlated with the laser energy density.",

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year = "1998",

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journal = "Journal of the Korean Physical Society",

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T1 - The correlation between the laser energy density and the properties of diamond-like carbon films with Nd:YAG (355 nm) excimer laser

AU - Jung, Hae Suk

AU - Park, Hyung Ho

AU - Pang, Seong Sik

AU - Lee, Sang Yeol

PY - 1998

Y1 - 1998

N2 - Diamond-like carbon (DLC) films were deposited using pulsed laser ablation of graphite target. The deposition process was performed with the change of laser energy density from 8 to 17 J/cm 2. Collected from analytical results, laser energy density is seen to play an important role in the formation of sp 3 carbon bondings in films. Also, the optimal deposition condition for DLC film was proposed and correlated with the laser energy density.

AB - Diamond-like carbon (DLC) films were deposited using pulsed laser ablation of graphite target. The deposition process was performed with the change of laser energy density from 8 to 17 J/cm 2. Collected from analytical results, laser energy density is seen to play an important role in the formation of sp 3 carbon bondings in films. Also, the optimal deposition condition for DLC film was proposed and correlated with the laser energy density.

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ER -

The correlation between the laser energy density and the properties of diamond-like carbon films with Nd:YAG (355 nm) excimer laser

Abstract

All Science Journal Classification (ASJC) codes

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