Texture and Magnetic Properties of FeTaN Films Bias-Sputtered on Sloping Surfaces

Jongill Hong; Shan X. Wang

doi:10.1109/20.706577

Texture and Magnetic Properties of FeTaN Films Bias-Sputtered on Sloping Surfaces

Jongill Hong, Shan X. Wang

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

The effect of texture evolution on the magnetic properties of FeTaN films sputtered on sloping surfaces is examined as substrate bias and slope angle are varied. When either substrate bias increases or N₂/Ar flow ratio decreases, the magnetic properties of the films become much softer. X-ray spectra and pole figures show that the increased substrate bias enhances both (110) fiber texture along the film normal and uniform distribution of [002] axes in the film plane. Increased bombardment of Ar ions also results in reduced (110) lattice spacing. An increased (110) peak intensity is similarly observed when the N₂/Ar flow ratio is decreased.

Original language	English
Pages (from-to)	1444-1446
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	34
Issue number	4 PART 1
DOIs	https://doi.org/10.1109/20.706577
Publication status	Published - 1998

Bibliographical note

Funding Information:
This work is partially supported by the NSF under grant No. ECS-9409805 and ECS-9710223, and has benefited from the facilities and equipment made available to Stanford University by the NSF-MRSEC program through the Center for Materials Research.

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/20.706577

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@article{01cf33a96436407faa95d05ee4e5f70b,

title = "Texture and Magnetic Properties of FeTaN Films Bias-Sputtered on Sloping Surfaces",

abstract = "The effect of texture evolution on the magnetic properties of FeTaN films sputtered on sloping surfaces is examined as substrate bias and slope angle are varied. When either substrate bias increases or N2/Ar flow ratio decreases, the magnetic properties of the films become much softer. X-ray spectra and pole figures show that the increased substrate bias enhances both (110) fiber texture along the film normal and uniform distribution of [002] axes in the film plane. Increased bombardment of Ar ions also results in reduced (110) lattice spacing. An increased (110) peak intensity is similarly observed when the N2/Ar flow ratio is decreased.",

author = "Jongill Hong and Wang, {Shan X.}",

note = "Funding Information: This work is partially supported by the NSF under grant No. ECS-9409805 and ECS-9710223, and has benefited from the facilities and equipment made available to Stanford University by the NSF-MRSEC program through the Center for Materials Research.",

year = "1998",

doi = "10.1109/20.706577",

language = "English",

volume = "34",

pages = "1444--1446",

journal = "IEEE Transactions on Magnetics",

issn = "0018-9464",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "4 PART 1",

}

TY - JOUR

T1 - Texture and Magnetic Properties of FeTaN Films Bias-Sputtered on Sloping Surfaces

AU - Hong, Jongill

AU - Wang, Shan X.

N1 - Funding Information: This work is partially supported by the NSF under grant No. ECS-9409805 and ECS-9710223, and has benefited from the facilities and equipment made available to Stanford University by the NSF-MRSEC program through the Center for Materials Research.

PY - 1998

Y1 - 1998

N2 - The effect of texture evolution on the magnetic properties of FeTaN films sputtered on sloping surfaces is examined as substrate bias and slope angle are varied. When either substrate bias increases or N2/Ar flow ratio decreases, the magnetic properties of the films become much softer. X-ray spectra and pole figures show that the increased substrate bias enhances both (110) fiber texture along the film normal and uniform distribution of [002] axes in the film plane. Increased bombardment of Ar ions also results in reduced (110) lattice spacing. An increased (110) peak intensity is similarly observed when the N2/Ar flow ratio is decreased.

AB - The effect of texture evolution on the magnetic properties of FeTaN films sputtered on sloping surfaces is examined as substrate bias and slope angle are varied. When either substrate bias increases or N2/Ar flow ratio decreases, the magnetic properties of the films become much softer. X-ray spectra and pole figures show that the increased substrate bias enhances both (110) fiber texture along the film normal and uniform distribution of [002] axes in the film plane. Increased bombardment of Ar ions also results in reduced (110) lattice spacing. An increased (110) peak intensity is similarly observed when the N2/Ar flow ratio is decreased.

UR - http://www.scopus.com/inward/record.url?scp=0032115575&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032115575&partnerID=8YFLogxK

U2 - 10.1109/20.706577

DO - 10.1109/20.706577

M3 - Article

AN - SCOPUS:0032115575

SN - 0018-9464

VL - 34

SP - 1444

EP - 1446

JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

IS - 4 PART 1

ER -

Texture and Magnetic Properties of FeTaN Films Bias-Sputtered on Sloping Surfaces

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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