Synthesis of zirconia (ZrO2) nanowires via chemical vapor deposition

M. K. Baek, S. J. Park, D. J. Choi

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19 Citations (Scopus)


Monoclinic zirconia nanowires were synthesized by chemical vapor deposition using ZrCl4 powder as a starting material at 1200 °C and 760 Torr. Graphite was employed as a substrate, and an Au thin film was pre-deposited on the graphite as a catalyst. The zirconia nanostructure morphology was observed through scanning electron microscopy and transmission electron microscopy. Based on X-ray diffraction, selected area electron diffraction, and Raman spectroscopy data, the resulting crystal structure was found to be single crystalline monoclinic zirconia. The homogeneous distributions of Zr, O and Au were studied by scanning transmission electron microscopy with energy dispersive X-ray spectroscopy mapping, and there was no metal droplet at the nanowire tips despite the use of an Au metal catalyst. This result is apart from that of conventional metal catalyzed nanowires.

Original languageEnglish
Pages (from-to)198-202
Number of pages5
JournalJournal of Crystal Growth
Publication statusPublished - 2017 Feb 1

Bibliographical note

Funding Information:
This work was supported by the Agency for Defense Development (ADD)(Grant number 2014-11-0664), Republic of Korea.

Publisher Copyright:
© 2016 Elsevier B.V.

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry


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