Synthesis of tin oxide films by dual ion beam sputtering using Sn target and oxygen ion beam

Yong Sahm Choe, Jae Ho Chung, Dae Seung Kim, Hong Koo Baik

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10 Citations (Scopus)


The properties of tin oxide films deposited at room temperature by dual ion beam sputtering (DIBS) using Sn targets and oxygen ion-beam have been examined as a function of oxygen ion energy. Studies by X-ray diffraction (XRD) showed that, with increasing oxygen ion-beam energy, the amorphous microstructure transformed into a crystalline SnO2 phase and the preferred orientations varied from (211), (101) to (002) on Si(100). Together with X-ray photoelectron spectroscopy (XPS), the Rutherford back-scattering (RBS) analyses revealed that, with an increase of oxygen ion-beam energy, the oxygen content and the packing density of the films increased slightly up to a value close to the stoichiometry of SnO2. These results indicate that crystalline SnO2 films can be synthesized at room temperature using DIBS with Sn target and oxygen ion-beam and also that the energetic oxygen ion-beams affect the phase formation, crystalline structure and the preferred orientation of the films.

Original languageEnglish
Pages (from-to)267-270
Number of pages4
JournalSurface and Coatings Technology
Issue number1-3
Publication statusPublished - 1999 Feb

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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