Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor

Jungwook Choi; Jongbaeg Kim

doi:10.1109/NEMS.2008.4484474

Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor

Jungwook Choi, Jongbaeg Kim

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A highly sensitive hydrogen sensor based on suspended and functionalized single tungsten nanowire is presented. The nanowire sensing structure is formed by Focused Ion Beam-Chemical Vapor Deposition on the batch-fabricated microelectrodes. The tungsten nanowire measures 10μm in length and 150nm in diameter, and is suspended 50μm above the wafer substrate connecting two microelectrodes. The nanowire is then functionalized by Pd-Pt metallization to be sensitive to hydrogen gas. The experimentally characterized hydrogen sensor shows 11.52% of resistance increase to the exposure to 10000ppm (1%) hydrogen gas and 99% nitrogen gas mixture at room temperature and atmospheric pressure. The lowest hydrogen concentration we measured is 10ppm with 0.58% corresponding resistance increase.

Original language	English
Title of host publication	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Pages	927-931
Number of pages	5
DOIs	https://doi.org/10.1109/NEMS.2008.4484474
Publication status	Published - 2008
Event	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China Duration: 2008 Jan 6 → 2008 Jan 9

Publication series

Name	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Other

Other	3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Country/Territory	China
City	Sanya
Period	08/1/6 → 08/1/9

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Electrical and Electronic Engineering

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10.1109/NEMS.2008.4484474

Cite this

@inproceedings{c06130712b5f47deb28871031a02f59f,

title = "Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor",

abstract = "A highly sensitive hydrogen sensor based on suspended and functionalized single tungsten nanowire is presented. The nanowire sensing structure is formed by Focused Ion Beam-Chemical Vapor Deposition on the batch-fabricated microelectrodes. The tungsten nanowire measures 10μm in length and 150nm in diameter, and is suspended 50μm above the wafer substrate connecting two microelectrodes. The nanowire is then functionalized by Pd-Pt metallization to be sensitive to hydrogen gas. The experimentally characterized hydrogen sensor shows 11.52% of resistance increase to the exposure to 10000ppm (1%) hydrogen gas and 99% nitrogen gas mixture at room temperature and atmospheric pressure. The lowest hydrogen concentration we measured is 10ppm with 0.58% corresponding resistance increase.",

author = "Jungwook Choi and Jongbaeg Kim",

year = "2008",

doi = "10.1109/NEMS.2008.4484474",

language = "English",

isbn = "9781424419081",

series = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS",

pages = "927--931",

booktitle = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008",

note = "3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 ; Conference date: 06-01-2008 Through 09-01-2008",

}

Choi, J & Kim, J 2008, Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor. in 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008., 4484474, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS, pp. 927-931, 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008, Sanya, China, 08/1/6. https://doi.org/10.1109/NEMS.2008.4484474

Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor. / Choi, Jungwook; Kim, Jongbaeg.
3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008. 2008. p. 927-931 4484474 (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor

AU - Choi, Jungwook

AU - Kim, Jongbaeg

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N2 - A highly sensitive hydrogen sensor based on suspended and functionalized single tungsten nanowire is presented. The nanowire sensing structure is formed by Focused Ion Beam-Chemical Vapor Deposition on the batch-fabricated microelectrodes. The tungsten nanowire measures 10μm in length and 150nm in diameter, and is suspended 50μm above the wafer substrate connecting two microelectrodes. The nanowire is then functionalized by Pd-Pt metallization to be sensitive to hydrogen gas. The experimentally characterized hydrogen sensor shows 11.52% of resistance increase to the exposure to 10000ppm (1%) hydrogen gas and 99% nitrogen gas mixture at room temperature and atmospheric pressure. The lowest hydrogen concentration we measured is 10ppm with 0.58% corresponding resistance increase.

AB - A highly sensitive hydrogen sensor based on suspended and functionalized single tungsten nanowire is presented. The nanowire sensing structure is formed by Focused Ion Beam-Chemical Vapor Deposition on the batch-fabricated microelectrodes. The tungsten nanowire measures 10μm in length and 150nm in diameter, and is suspended 50μm above the wafer substrate connecting two microelectrodes. The nanowire is then functionalized by Pd-Pt metallization to be sensitive to hydrogen gas. The experimentally characterized hydrogen sensor shows 11.52% of resistance increase to the exposure to 10000ppm (1%) hydrogen gas and 99% nitrogen gas mixture at room temperature and atmospheric pressure. The lowest hydrogen concentration we measured is 10ppm with 0.58% corresponding resistance increase.

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T3 - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

SP - 927

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BT - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008

T2 - 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008

Y2 - 6 January 2008 through 9 January 2008

ER -

Suspended nanowire bridge fabricated by focused ion beam as a hydrogen sensor

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