Suspended Alumina Membrane for GA2O3 Gas Sensor with Enhanced Lifetime at High-Temperature

Han Il Jeong, Gyujun Choi, Jongbaeg Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We demonstrate micro hotplate (mu mathrm{HP}) to utilize gallium oxide with high stability and sensing performance at high temperatures as a sensing material. In order to enhance the lifetime and reduce the heat loss during high-temperature operation, a platinum electrode was embedded between two alumina thin films in a suspended bridge shape. The fabrication process involves no high-temperature process such as sintering, despite the use of ceramic materials, making it compatible with CMOS process. While the conventional silicon nitride-based mu mathrm{HP} damaged the platinum electrode within 5 seconds at 650°C, the alumina-based mu mathrm{HP} endured without failure for over 110 hours. The deposited gallium oxide thin film on the fabricated alumina mu mathrm{HP} successfully detected carbon monoxide and nitrogen dioxide at 650°C, showing that the developed sensor platform is suitable for high-temperature application such as exhaust gas detection.

Original languageEnglish
Title of host publication33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages729-732
Number of pages4
ISBN (Electronic)9781728135809
DOIs
Publication statusPublished - 2020 Jan
Event33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada
Duration: 2020 Jan 182020 Jan 22

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2020-January
ISSN (Print)1084-6999

Conference

Conference33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Country/TerritoryCanada
CityVancouver
Period20/1/1820/1/22

Bibliographical note

Publisher Copyright:
© 2020 IEEE.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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