Suppression of oxidation of metal emitters by incorporating ruthenium oxide

Young Joon Yoon; Dong Soo Yoon; Hong Koo Baik; Sung Man Lee; Kie Moon Song; Se Jong Lee

doi:10.1116/1.591309

Suppression of oxidation of metal emitters by incorporating ruthenium oxide

Young Joon Yoon, Dong Soo Yoon, Hong Koo Baik, Sung Man Lee, Kie Moon Song, Se Jong Lee

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The applicability of the RuO₂ incorporated metal emitters for the cathode of the field emission display (FED) was investigated. The RuO₂ incorporated Ta film showed an amorphous structure for the as-deposited state and formed a conductive RuO₂ phase after annealing without a change in the amorphous structure. This structure could prevent both oxygen indiffusion and oxide formation for the metal matrix, sufficiently, due to the strong bonds of Ta-O or Ta-Ru-O.

Original language	English
Pages (from-to)	972-975
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	18
Issue number	2
DOIs	https://doi.org/10.1116/1.591309
Publication status	Published - 2000 Mar

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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abstract = "The applicability of the RuO2 incorporated metal emitters for the cathode of the field emission display (FED) was investigated. The RuO2 incorporated Ta film showed an amorphous structure for the as-deposited state and formed a conductive RuO2 phase after annealing without a change in the amorphous structure. This structure could prevent both oxygen indiffusion and oxide formation for the metal matrix, sufficiently, due to the strong bonds of Ta-O or Ta-Ru-O.",

author = "Yoon, {Young Joon} and Yoon, {Dong Soo} and Baik, {Hong Koo} and Lee, {Sung Man} and Song, {Kie Moon} and Lee, {Se Jong}",

year = "2000",

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doi = "10.1116/1.591309",

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AU - Yoon, Young Joon

AU - Yoon, Dong Soo

AU - Baik, Hong Koo

AU - Lee, Sung Man

AU - Song, Kie Moon

AU - Lee, Se Jong

PY - 2000/3

Y1 - 2000/3

N2 - The applicability of the RuO2 incorporated metal emitters for the cathode of the field emission display (FED) was investigated. The RuO2 incorporated Ta film showed an amorphous structure for the as-deposited state and formed a conductive RuO2 phase after annealing without a change in the amorphous structure. This structure could prevent both oxygen indiffusion and oxide formation for the metal matrix, sufficiently, due to the strong bonds of Ta-O or Ta-Ru-O.

AB - The applicability of the RuO2 incorporated metal emitters for the cathode of the field emission display (FED) was investigated. The RuO2 incorporated Ta film showed an amorphous structure for the as-deposited state and formed a conductive RuO2 phase after annealing without a change in the amorphous structure. This structure could prevent both oxygen indiffusion and oxide formation for the metal matrix, sufficiently, due to the strong bonds of Ta-O or Ta-Ru-O.

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JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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ER -

Suppression of oxidation of metal emitters by incorporating ruthenium oxide

Abstract

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