Suppression of oxidation of metal emitters by incorporating ruthenium oxide

Young Joon Yoon, Dong Soo Yoon, Hong Koo Baik, Sung Man Lee, Kie Moon Song, Se Jong Lee

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


The applicability of the RuO2 incorporated metal emitters for the cathode of the field emission display (FED) was investigated. The RuO2 incorporated Ta film showed an amorphous structure for the as-deposited state and formed a conductive RuO2 phase after annealing without a change in the amorphous structure. This structure could prevent both oxygen indiffusion and oxide formation for the metal matrix, sufficiently, due to the strong bonds of Ta-O or Ta-Ru-O.

Original languageEnglish
Pages (from-to)972-975
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number2
Publication statusPublished - 2000 Mar

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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