Study on design of zno-based thin-film transistors with optimal mechanical stability

Deok Kyu Lee, Kyungyea Park, Jong Hyun Ahn, Nae Eung Lee, Youn Jea Kim

Research output: Contribution to journalArticlepeer-review


ZnO-based thin-film transistors (TFTs) have been fabricated and the mechanical characteristics of electric circuits, such as stress, strain, and deformation are analyzed by the finite element method (FEM). In this study, a mechanical-stability design guide for such systems is proposed; this design takes into account the stress and deformation of the bridge to estimate the stress distribution in an SiO2 film with O to 5% stretched on 0.5-μm-thick. The predicted buckle amplitude of SiO2 bridges agrees well with experimental results within 0.5% error. The stress and strain at the contact point between bridges and a pad were measured in a previous structural analysis. These structural analysis suggest that the numerical measurement of deformation, SU-8 coating thickness for Neutral Mechanical Plane (NMP) and ITO electrode size on a dielectric layer was useful in enhancing the structural and electrical stabilities.

Original languageEnglish
Pages (from-to)17-22
Number of pages6
JournalTransactions of the Korean Society of Mechanical Engineers, B
Issue number1
Publication statusPublished - 2011 Jan

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering


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