Structural properties of BaTiO₃ thin films on Si grown by metalorganic chemical vapor deposition

Chemistry

• Liquid Film 100%
• X-Ray Diffraction 75%
• Metallorganic Chemical Vapor Deposition 50%
• Auger Electron Spectroscopy 25%
• Epitaxial Film 25%
• Amorphous Material 25%
• Phase Composition 25%
• Reaction Temperature 25%
• Thickness 25%
• Ferroelectricity 25%

Material Science

• Liquid Films 100%
• Thin Films 50%
• Structural Property 25%
• Epitaxial Film 25%
• Ferroelectric Material 25%
• Amorphous Material 25%

Physics

• Thin Films 50%
• Metalorganic Chemical Vapor Deposition 50%
• Substrates 50%
• Transmission Electron Microscopy 25%
• Temperature 25%
• Failure 25%