Structural, electrical, and optical properties of photochemical metal-organic-deposited ZnO thin films incorporated with Ag nanoparticles and graphene

Ag nanoparticles (NPs) and/or graphene were incorporated into a zinc oxide (ZnO) photosensitive precursor solution. Then, directpatternable ZnO nanocomposite thin films were fabricated via photochemical metal-organic deposition. The transmittance and crystallinity of ZnO films were not almost changed but the resistivity of ZnO thin films was decreased by after incorporation of Ag NPs and/or graphene. Especially a double incorporation (Ag NPs and graphene) led to a greater decrease in the resistivity of the films more than the single incorporation (Ag NPs or graphene). This difference in resistivities was due to the combined enhancement of both the carrier concentration and mobility. The improvements in the electron concentration and mobility of ZnO composite films were largely dependent upon the introduction of Ag NPs and graphene, respectively. ZnO composite films could be direct-patterned without a photoresist and/or dry etching. Therefore, our results show that the cost of fabrication can be reduced by using a direct micro-patterning system and that the electrical properties of ZnO thin films can be improved by the incorporation of Ag NPs and graphene, while maintaining the structural and optical properties of the films.