Structural and optical features of nanoporous silicon prepared by electrochemical anodic etching

D. A. Kim, S. I. Im, C. M. Whang, W. S. Cho, Y. C. Yoo, N. H. Cho, J. G. Kim, Y. J. Kwon

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17 Citations (Scopus)


Nanoporous silicon (NPS) samples were prepared by electrochemical anodic etching of p-type (0 0 1) silicon wafers in HF solution, and some of them were aged in air. The nanostructural, optical and chemical features of the NPS were investigated in terms of etching and aging conditions. The surface of the porous Si exhibits an etched layer with a thickness of 30-40nm; this layer appears to consist of aggregates of 5-10nm size nano-crystallites. The NPS exhibited broad photoluminescence (PL) spectra with its peak in the red light region (∼740nm). After aging the porous samples for 4 weeks in air, we observed the PL intensity became approximately a fifth of that of the as-prepared one, along with a blue shift. It is very likely that the blue shift of the PL peak was caused by the shrinkage of the Si nano-crystallites due to the oxidation in the surface of the nano-crystallites.

Original languageEnglish
Pages (from-to)125-130
Number of pages6
JournalApplied Surface Science
Issue number1-4
Publication statusPublished - 2004 May 31

Bibliographical note

Funding Information:
This work was supported by Korea Research Foundation Gant (KRF-2001-005-E00009).

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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