Structural and electrical properties of ZnO thin films deposited by atomic layer deposition at low temperatures

Sunyeol Jeon, Seokhwan Bang, Seungjun Lee, Semyung Kwon, Wooho Jeong, Hyeongtag Jeon, Ho Jung Chang, Hyung Ho Park

Research output: Contribution to journalArticlepeer-review

45 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Structural and electrical properties of ZnO thin films deposited by atomic layer deposition at low temperatures'. Together they form a unique fingerprint.

Engineering

Material Science