Abstract
Fabrication and spectral characteristics of n-ZnO/p-Si photodiodes that operated on the visible range and were fully isolated with the ion-beam induced technique were presented. It was shown that the isolated photodiodes demonstrated quantum efficiency of 70% maximum at 650 nm and 10% minimum at 420 nm. It was found that ion-beam-induced isolation was effective in reducing dark leakage currents, when the dose of Si+ ions reached 5×105 cm-2.
Original language | English |
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Pages (from-to) | 3973-3975 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 82 |
Issue number | 22 |
DOIs | |
Publication status | Published - 2003 Jun 2 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)