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Significant enhancement of the dielectric constant through the doping of CeO 2 into HfO 2 by atomic layer deposition
Woo Hee Kim, Min Kyu Kim, Il Kwon Oh, Wan Joo Maeng, Taehoon Cheon, Soo Hyun Kim, Atif Noori, David Thompson, Schubert Chu, Hyungjun Kim
Research output: Contribution to journal › Article › peer-review
17
Citations
(Scopus)