Si (-Zr)/Ag multilayer thin-film anodes for microbatteries

Seung Joo Lee, Heon Young Lee, Youngsin Park, Hong Koo Baik, Sung Man Lee

Research output: Contribution to journalConference articlepeer-review

13 Citations (Scopus)


Thin film Si/Ag and (Si-Zr)/Ag multilayer electrodes are fabricated on a Cu substrate by alternate sputtering from Si (-Zr) and Ag at room temperature, and their electrochemical properties are investigated. The insertion of the Ag layer into the Si layer improves the cycling performance. The cyclability can be further improved by doping Zr into the Si layer of the Si/Ag multilayer thin films. The effects of the electrode configuration and the contact stability between the current-collecting layer and the electrode on the cycling performance are discussed.

Original languageEnglish
Pages (from-to)117-120
Number of pages4
JournalJournal of Power Sources
Publication statusPublished - 2003 Jun 1
EventSelected Papers Presented at the 11th IMLB - Monterey, CA, United States
Duration: 2002 Jun 222002 Jun 28

Bibliographical note

Funding Information:
This work was supported by the Korean Ministry of Science and Technology through the research program for ‘National Research Laboratory’.

All Science Journal Classification (ASJC) codes

  • Renewable Energy, Sustainability and the Environment
  • Energy Engineering and Power Technology
  • Physical and Theoretical Chemistry
  • Electrical and Electronic Engineering


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