SI thin-film anode for microbatteries

Seung Joo Lee; Jong Ki Lee; Hong Koo Baik; Sung Man Lee

SI thin-film anode for microbatteries

Seung Joo Lee, Jong Ki Lee, Hong Koo Baik, Sung Man Lee

Department of Materials Science and Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

Si and Si-Ni thin-film electrodes for use as anodes of microbatteries were fabricated by using RF magnetron sputtering method. The deposited thin films composed of very fine X-ray amorphous particles. Si thin-film electrode reacted with Li with little irreversible reaction at the first cycle. Thin (up to 1300Å) electrodes showed good cyclability and rate capability. Si-Ni thin-film electrode with moderate Ni content showed better cyclability than pure Si thin-film electrode.

Original language	English
Pages	100-105
Number of pages	6
Publication status	Published - 2000
Event	Micro Power Sources - Proceedings of the International Symposium - Toronto, Ont., Canada Duration: 2000 May 14 → 2000 May 16

Other

Other	Micro Power Sources - Proceedings of the International Symposium
Country/Territory	Canada
City	Toronto, Ont.
Period	00/5/14 → 00/5/16

All Science Journal Classification (ASJC) codes

Engineering(all)

Cite this

@conference{e9450011f3644fba86abe2a88ddd373a,

title = "SI thin-film anode for microbatteries",

abstract = "Si and Si-Ni thin-film electrodes for use as anodes of microbatteries were fabricated by using RF magnetron sputtering method. The deposited thin films composed of very fine X-ray amorphous particles. Si thin-film electrode reacted with Li with little irreversible reaction at the first cycle. Thin (up to 1300{\AA}) electrodes showed good cyclability and rate capability. Si-Ni thin-film electrode with moderate Ni content showed better cyclability than pure Si thin-film electrode.",

author = "Lee, {Seung Joo} and Lee, {Jong Ki} and Baik, {Hong Koo} and Lee, {Sung Man}",

year = "2000",

language = "English",

pages = "100--105",

note = "Micro Power Sources - Proceedings of the International Symposium ; Conference date: 14-05-2000 Through 16-05-2000",

}

TY - CONF

T1 - SI thin-film anode for microbatteries

AU - Lee, Seung Joo

AU - Lee, Jong Ki

AU - Baik, Hong Koo

AU - Lee, Sung Man

PY - 2000

Y1 - 2000

N2 - Si and Si-Ni thin-film electrodes for use as anodes of microbatteries were fabricated by using RF magnetron sputtering method. The deposited thin films composed of very fine X-ray amorphous particles. Si thin-film electrode reacted with Li with little irreversible reaction at the first cycle. Thin (up to 1300Å) electrodes showed good cyclability and rate capability. Si-Ni thin-film electrode with moderate Ni content showed better cyclability than pure Si thin-film electrode.

AB - Si and Si-Ni thin-film electrodes for use as anodes of microbatteries were fabricated by using RF magnetron sputtering method. The deposited thin films composed of very fine X-ray amorphous particles. Si thin-film electrode reacted with Li with little irreversible reaction at the first cycle. Thin (up to 1300Å) electrodes showed good cyclability and rate capability. Si-Ni thin-film electrode with moderate Ni content showed better cyclability than pure Si thin-film electrode.

UR - http://www.scopus.com/inward/record.url?scp=5744242316&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=5744242316&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:5744242316

SP - 100

EP - 105

T2 - Micro Power Sources - Proceedings of the International Symposium

Y2 - 14 May 2000 through 16 May 2000

ER -

SI thin-film anode for microbatteries

Abstract

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All Science Journal Classification (ASJC) codes

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