Abstract
The fabrication and the characteristics of an inorganic silicon-based flexible tactile sensor equipped with active-matrix circuitry compatible with a batch microfabrication process are reported. An 8 × 8 array of 260 nm-thick silicon strain gauges along with individual thin film transistor switches was built on a plastic substrate with 1 mm spacing, corresponding to a human spatial resolution at the fingertip. We demonstrated that the sensor shows excellent performances in terms of repeatability of 1.1%, hysteresis of 1.0%, scanning speed of as much as 100 kHz and resolution of 12.4 kPa while maintaining low power consumption and signal crosstalk through a series of experiments.
Original language | English |
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Article number | 043502 |
Journal | Applied Physics Letters |
Volume | 106 |
Issue number | 4 |
DOIs | |
Publication status | Published - 2015 Jan 26 |
Bibliographical note
Publisher Copyright:© 2015 AIP Publishing LLC.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)