Self-tailored one-dimensional ZnO nanodot arrays formed by metalorganic chemical vapor deposition

Sang Woo Kim, Masaya Ueda, Teruhisa Kotani, Shizuo Fujita, Shigeo Fujita

Research output: Contribution to journalLetterpeer-review

14 Citations (Scopus)

Abstract

One-dimensional ZnO nanodot arrays have been realized by metalorganic chemical vapor deposition on SiO2 substrates patterned by focused ion beam (FIB). Especially for the lines with the depth of 5 nm and the length of 0.7, 1.3 or 1.7μm, one, two or three nanodots, respectively, of fairly uniform size 6-nm height and 80-nm width are symmetrically accommodated in a line. These phenomena are translated as "self-tailoring" of ZnO nanodots, i.e., where the nanodots will be predetermined before the growth and is arbitrarily controlled by the nanopatterns. This can be a promising technique to build nanostructure blocks for nanoscale device applications.

Original languageEnglish
Pages (from-to)L568-L571
JournalJapanese Journal of Applied Physics
Volume42
Issue number6 A
DOIs
Publication statusPublished - 2003 Jun 1

All Science Journal Classification (ASJC) codes

  • General Engineering
  • General Physics and Astronomy

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