Self-pattern process of InZnO thin-film transistors using photosensitive precursors

Hee Jun Kim, Yeong Gyu Kim, Sung Pyo Park, Dongwoo Kim, Na Eun Kim, Jong Sun Choi, Hyun Jae Kim

Research output: Contribution to journalConference articlepeer-review

9 Citations (Scopus)


We demonstrated self-patternable InZnO (IZO) thin-film transistors (TFTS) using photosensitive precursors. UV-irradiated films became cross-linked and solution-processed IZO films were patterned successfully. Compared to self-patterned IZO TFTs using photosensitive activators, precursor-based self-patterned IZO TFTs have better electrical characteristics and stability due to having less organic residues.

Original languageEnglish
Pages (from-to)180-182
Number of pages3
JournalDigest of Technical Papers - SID International Symposium
Issue number1
Publication statusPublished - 2017
EventSID Symposium, Seminar, and Exhibition 2017, Display Week 2017 - Los Angeles, United States
Duration: 2017 May 212017 May 26

Bibliographical note

Funding Information:
This work was supported by the Industrial Strategic Technology Development Program (10063038, Development of sub-micro in-situ light patterning to minimize damage on flexible substrates) funded by the Ministry of Trade, Industry & Energy (MOTIE, Korea).

Publisher Copyright:
© (2017) by SID-the Society for Information Display. All rights reserved.

All Science Journal Classification (ASJC) codes

  • Engineering(all)


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