Self-organized ZnO quantum dots on SiO2/Si substrates by metalorganic chemical vapor deposition

Sang Woo Kim, Shizuo Fujita, Shigeo Fujita

Research output: Contribution to journalArticlepeer-review

157 Citations (Scopus)

Abstract

Self-organized ZnO quantum dots (QD) were fabricated on SiO2/Si substrates by metalorganic chemical vapor deposition. The size and density of dots were analyzed by atomic force microscopy. Photoluminescence at 10 K exhibited the broad spectra with band tails up to about 3.55 and 3.65 eV for the as-grown and the annealed ZnO dots, respectively. Results indicated that the broad emission band was due to quantum size effect, showing the dot size inhomogeneity.

Original languageEnglish
Pages (from-to)5036-5038
Number of pages3
JournalApplied Physics Letters
Volume81
Issue number26
DOIs
Publication statusPublished - 2002 Dec 23

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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