Abstract
Selective stiction has been successfully applied to the batch fabrication of angular vertical comb actuators made of single crystalline silicon with self-aligned comb-sets. The fabrication process with optimal designs of mechanical springs enables the stiction of microstructures in a controlled manner and significantly reduces unwanted compliances on the actuators, preventing unwarranted motion and providing stable operations. The prototype microactuators operate at a resonant frequency around 0.92kHz with 85 degrees optical scanning angle and quality factor of 162 in air under driving voltages of 19V dc plus 15V pp. Applications to scanning micromirrors, optical switches, and variable capacitors are a few of the MEMS uses; we present results obtained with MEMS mirrors.
| Original language | English |
|---|---|
| Article number | TPa40 |
| Pages (from-to) | 403-406 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Publication status | Published - 2005 |
| Event | 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: 2005 Jan 30 → 2005 Feb 3 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering