Selective passivation of 2D TMD surface defects by atomic layer deposited Al₂O₃ to enhance recovery properties of gas sensor

Material Science

• Al2O3 100%
• Surface Defect 100%
• Gas Sensor 100%
• Transition Metal Dichalcogenides 100%
• Gas 33%
• Photoluminescence 16%
• Nucleation 16%
• Scanning Electron Microscopy 16%
• Defect Density 16%
• Chemisorption 16%
• Surface 16%
• Electron Microscopy 16%
• Temperature 16%
• X-Ray Photoelectron Spectroscopy 16%
• Nitrogen Dioxide 16%

Engineering

• Atomic Layer 100%
• Passivation 100%
• Recovery 100%
• Recovery Rate 66%
• Defects 50%
• Active Surface 16%
• Data Show 16%
• MoS2 16%
• Ray Photoelectron Spectroscopy 16%
• Basal Plane 16%
• Reducing Gas 16%
• Demonstrates 16%
• Lower Surface 16%