Selective formation of ZnO nanodots on nanopatterned substrates by metalorganic chemical vapor deposition

Sang Woo Kim, Teruhisa Kotani, Masaya Ueda, Shizuo Fujita, Shigeo Fujita

Research output: Contribution to journalArticlepeer-review

42 Citations (Scopus)

Abstract

The selective formation of zinc oxide (ZnO) nanodots on nanopatterned SiO2/Si substrates was discussed. The nanodots were formed by metalorganic vapor deposition. The nanodots were formed in nanopatterned lines by etching of SiO2 with focused ion beam (FIB). The results showed that the emission originated from the selectively grown ZnO nanodots.

Original languageEnglish
Pages (from-to)3593-3595
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number17
DOIs
Publication statusPublished - 2003 Oct 27

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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