Abstract
An air-gap field-effect transistor (FET) was prepared by selectively aligning a Ni-capped ZnO nanowire in a magnetic field on a pre-fabricated electrode patterns formed by lithography. It was demonstrated that the magnetic alignment technique could be applied effectively to the fabrication of air-gap nanowire FETs with desired circuit configurations. This device showed operational characteristic strongly dependent on the possible surface adsorbates originating from the negatively charged oxygen related species, as compared to the back-gate nanowire FET separately prepared for comparison. These results will illuminate the prospect of realizing producible matrix-type devices based on one-dimensional nanostructures such as logic circuits and biochemical sensors.
Original language | English |
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Pages (from-to) | 10-14 |
Number of pages | 5 |
Journal | Microelectronic Engineering |
Volume | 87 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2010 Jan |
Bibliographical note
Funding Information:This work was supported by the Korea Science and Engineering Foundation (KOSEF) Grant funded by the Korea Government (MOST) (No. R01-2007-000-20143-0) and by the academic-industrial cooperation program funded by LG Display.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering