SAW signal conditioner-based dynamic capacitive sensor for high-speed gap measurement

J. G. Kim; T. J. Lee; N. C. Park; Y. P. Park; K. S. Park

doi:10.1016/j.sna.2012.09.017

SAW signal conditioner-based dynamic capacitive sensor for high-speed gap measurement

J. G. Kim, T. J. Lee, N. C. Park, Y. P. Park, K. S. Park

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

High-speed gap measurement in the nano/micrometer range presents unique engineering challenges. A signal conditioner is required for capacitive sensors to amplify, denoise, and restrict the bandwidth. In this work, a capacitive sensor was used in combination with a SAW device that serves as a signal conditioner. The proposed system provides 2.75 MHz bandwidth through amplitude modulation using the center frequency of the SAW device as a carrier signal and has outstanding signal conditioning capabilities. Construction and characterization of a SAW-based capacitive gap sensor to measure a 200 Hz gap frequency are described.

Original language	English
Pages (from-to)	204-211
Number of pages	8
Journal	Sensors and Actuators, A: Physical
Volume	189
DOIs	https://doi.org/10.1016/j.sna.2012.09.017
Publication status	Published - 2013

Bibliographical note

Funding Information:
This work was supported by National Research Foundation of Korea ( NRF-2009-0076065 ).

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2012.09.017

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title = "SAW signal conditioner-based dynamic capacitive sensor for high-speed gap measurement",

abstract = "High-speed gap measurement in the nano/micrometer range presents unique engineering challenges. A signal conditioner is required for capacitive sensors to amplify, denoise, and restrict the bandwidth. In this work, a capacitive sensor was used in combination with a SAW device that serves as a signal conditioner. The proposed system provides 2.75 MHz bandwidth through amplitude modulation using the center frequency of the SAW device as a carrier signal and has outstanding signal conditioning capabilities. Construction and characterization of a SAW-based capacitive gap sensor to measure a 200 Hz gap frequency are described.",

author = "Kim, {J. G.} and Lee, {T. J.} and Park, {N. C.} and Park, {Y. P.} and Park, {K. S.}",

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AU - Kim, J. G.

AU - Lee, T. J.

AU - Park, N. C.

AU - Park, Y. P.

AU - Park, K. S.

N1 - Funding Information: This work was supported by National Research Foundation of Korea ( NRF-2009-0076065 ).

PY - 2013

Y1 - 2013

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AB - High-speed gap measurement in the nano/micrometer range presents unique engineering challenges. A signal conditioner is required for capacitive sensors to amplify, denoise, and restrict the bandwidth. In this work, a capacitive sensor was used in combination with a SAW device that serves as a signal conditioner. The proposed system provides 2.75 MHz bandwidth through amplitude modulation using the center frequency of the SAW device as a carrier signal and has outstanding signal conditioning capabilities. Construction and characterization of a SAW-based capacitive gap sensor to measure a 200 Hz gap frequency are described.

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JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -

SAW signal conditioner-based dynamic capacitive sensor for high-speed gap measurement

Abstract

Bibliographical note

All Science Journal Classification (ASJC) codes

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