Ru nanodot synthesis using CO2 supercritical fluid deposition

Doyoung Kim, Han Bo Ram Lee, Jaehong Yoon, Hyungjun Kim

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


CO2-based supercritical fluid deposition (SCFD) was utilized for the synthesis of ruthenium nanostructures on Si substrates and hafnium oxide (HfO2) films. Ru nanodots were formed by the reduction of a Ru precursor under a hydrogen environment. Ruthenium carbonyl was dissolved in supercritical CO2 in a pre-mix vessel, and this mixture was pumped into a reaction vessel which allowed it to undergo rapid expansion. The formation of Ru nanodots was studied as a function of key process parameters such as the weight of precursor used, the reaction temperature and the H 2 reactant pressure. Utilizing the Ru nanodots on a HfO2 control oxide, a flash memory device containing nanodots was fabricated and its memory characteristics were demonstrated.

Original languageEnglish
Pages (from-to)664-667
Number of pages4
JournalJournal of Physics and Chemistry of Solids
Issue number5
Publication statusPublished - 2013 May

All Science Journal Classification (ASJC) codes

  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics


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