Abstract
We report the synthesis of carbon nanotubes (CNT) by localized resistive heating of a MEMS structure in a room temperature chamber. This is the first known vapor-deposition CNT growth method that does not require globally elevated temperatures. The localized, selective, and scalable process is compatible with on-chip microelectronics and removes necessity of post-synthesis assembly of nanostructures to form integrated devices. Synthesized nanotube dimensions are 5-50 nm in diameter and up to 7 μm in length. Growth rates of up to 0.25 μm/min were observed. This accomplishment makes possible the direct integration of CNT devices with on-chip transduction, readout, processing, and communications circuitry, facilitating integration of nanotechnology with larger-scale systems.
Original language | English |
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Title of host publication | 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings |
Publisher | IEEE Computer Society |
Pages | 581-584 |
Number of pages | 4 |
ISBN (Electronic) | 0780379764 |
DOIs | |
Publication status | Published - 2003 |
Event | 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - San Francisco, United States Duration: 2003 Aug 12 → 2003 Aug 14 |
Publication series
Name | Proceedings of the IEEE Conference on Nanotechnology |
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Volume | 2 |
ISSN (Print) | 1944-9399 |
ISSN (Electronic) | 1944-9380 |
Other
Other | 2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 |
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Country/Territory | United States |
City | San Francisco |
Period | 03/8/12 → 03/8/14 |
Bibliographical note
Publisher Copyright:© 2003 IEEE.
All Science Journal Classification (ASJC) codes
- Bioengineering
- Electrical and Electronic Engineering
- Materials Chemistry
- Condensed Matter Physics