Room temperature local synthesis of carbon nanotubes

D. Christensen, O. Englander, Jongbaeg Kim, Liwei Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Citations (Scopus)


We report the synthesis of carbon nanotubes (CNT) by localized resistive heating of a MEMS structure in a room temperature chamber. This is the first known vapor-deposition CNT growth method that does not require globally elevated temperatures. The localized, selective, and scalable process is compatible with on-chip microelectronics and removes necessity of post-synthesis assembly of nanostructures to form integrated devices. Synthesized nanotube dimensions are 5-50 nm in diameter and up to 7 μm in length. Growth rates of up to 0.25 μm/min were observed. This accomplishment makes possible the direct integration of CNT devices with on-chip transduction, readout, processing, and communications circuitry, facilitating integration of nanotechnology with larger-scale systems.

Original languageEnglish
Title of host publication2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - Proceedings
PublisherIEEE Computer Society
Number of pages4
ISBN (Electronic)0780379764
Publication statusPublished - 2003
Event2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003 - San Francisco, United States
Duration: 2003 Aug 122003 Aug 14

Publication series

NameProceedings of the IEEE Conference on Nanotechnology
ISSN (Print)1944-9399
ISSN (Electronic)1944-9380


Other2003 3rd IEEE Conference on Nanotechnology, IEEE-NANO 2003
Country/TerritoryUnited States
CitySan Francisco

Bibliographical note

Publisher Copyright:
© 2003 IEEE.

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Electrical and Electronic Engineering
  • Materials Chemistry
  • Condensed Matter Physics


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