RF power dependence of refractive index of room temperature sputtered ZnO:Al thin films

Bhaskar Chandra Mohanty; Deuk Ho Yeon; Jae Ho Yun; Jun Sik Cho; Yong Soo Cho

doi:10.1007/s00339-013-7831-z

RF power dependence of refractive index of room temperature sputtered ZnO:Al thin films

Bhaskar Chandra Mohanty, Deuk Ho Yeon, Jae Ho Yun, Jun Sik Cho, Yong Soo Cho

Department of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

The deposition power dependence of visible transmittance and refractive index of room temperature-deposited ZnO:Al thin films by RF magnetron sputtering has been studied. All films exhibited high visible transmittance and near-complete UV absorption. The refractive index of the films decreased continuously with an increase in the RF power at all photon energies in the visible and near-IR region, which has been partially attributed to the decreased packing density of the films. For each film, the refractive index exhibited strong frequency dispersion in the weak-absorption region. The origin of optical dispersion at different RF power has been discussed in the light of a single-oscillator model.

Original language	English
Pages (from-to)	347-351
Number of pages	5
Journal	Applied Physics A: Materials Science and Processing
Volume	115
Issue number	1
DOIs	https://doi.org/10.1007/s00339-013-7831-z
Publication status	Published - 2014 Apr

Bibliographical note

Funding Information:
This work was financially supported by the Converging Research Center Program (2012K001270) and by the National Research Foundation of Korea (NRF) grant funded by the Korean government (MEST) (2011-0020285).

All Science Journal Classification (ASJC) codes

Chemistry(all)
Materials Science(all)

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abstract = "The deposition power dependence of visible transmittance and refractive index of room temperature-deposited ZnO:Al thin films by RF magnetron sputtering has been studied. All films exhibited high visible transmittance and near-complete UV absorption. The refractive index of the films decreased continuously with an increase in the RF power at all photon energies in the visible and near-IR region, which has been partially attributed to the decreased packing density of the films. For each film, the refractive index exhibited strong frequency dispersion in the weak-absorption region. The origin of optical dispersion at different RF power has been discussed in the light of a single-oscillator model.",

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doi = "10.1007/s00339-013-7831-z",

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AU - Yun, Jae Ho

AU - Cho, Jun Sik

AU - Cho, Yong Soo

N1 - Funding Information: This work was financially supported by the Converging Research Center Program (2012K001270) and by the National Research Foundation of Korea (NRF) grant funded by the Korean government (MEST) (2011-0020285).

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N2 - The deposition power dependence of visible transmittance and refractive index of room temperature-deposited ZnO:Al thin films by RF magnetron sputtering has been studied. All films exhibited high visible transmittance and near-complete UV absorption. The refractive index of the films decreased continuously with an increase in the RF power at all photon energies in the visible and near-IR region, which has been partially attributed to the decreased packing density of the films. For each film, the refractive index exhibited strong frequency dispersion in the weak-absorption region. The origin of optical dispersion at different RF power has been discussed in the light of a single-oscillator model.

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RF power dependence of refractive index of room temperature sputtered ZnO:Al thin films

Abstract

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