Abstract
We demonstrate the effect of nanoresonator geometry on the resonance property using a magnetomotive transduction technique for SiC nanoresonator s in moderate conditions of pressure, temperature, and magnetic intensity. These trials were performed in conditions similar to those useful for practical applications to assist in the deployment of SiC-based nanoelectro-mechanical system prototype devices. This letter confirms that the resonant properties of a nanoscaled electromechanical resonator in moderate conditions are similar to those found during tests in ideal conditions. The resonance characteristics were analyzed based on the geometrical changes of the nanoresonator. The radiofrequency performance parameters such as the critical amplitude and dynamic range, which are crucial in the determination of linear operation range of nanoresonators, were maintained at a level comparable to those found under laboratory conditions. This letter brings this technology closer to practical applications in sensors, Alters, and the oscillation of nanoscaled electromechanical devices.
| Original language | English |
|---|---|
| Article number | 5235126 |
| Pages (from-to) | 1042-1044 |
| Number of pages | 3 |
| Journal | IEEE Electron Device Letters |
| Volume | 30 |
| Issue number | 10 |
| DOIs | |
| Publication status | Published - 2009 Oct |
Bibliographical note
Funding Information:Manuscript received June 26, 2009. First published September 11, 2009; current version published September 29, 2009. This work was supported in part by Yonsei University under Research Grant 2008-1-0115 and in part by the Samsung Advanced Institute of Technology. The review of this letter was arranged by Editor S.-H. Ryu.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering