Resonance properties of 3C-SiC nanoelectromechanical resonator in room-temperature magnetomotive transduction

Seong Chan Jun, Joon Hyong Cho, Whan Kyun Kim, Young Mo Jung, Sukju Hwang, Sangchul Shin, Ji Yoong Kang, Jeashik Shin, Insang Song, Jae Young Choi, Sang Yoon Lee, Jong Min Kim

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


We demonstrate the effect of nanoresonator geometry on the resonance property using a magnetomotive transduction technique for SiC nanoresonator s in moderate conditions of pressure, temperature, and magnetic intensity. These trials were performed in conditions similar to those useful for practical applications to assist in the deployment of SiC-based nanoelectro-mechanical system prototype devices. This letter confirms that the resonant properties of a nanoscaled electromechanical resonator in moderate conditions are similar to those found during tests in ideal conditions. The resonance characteristics were analyzed based on the geometrical changes of the nanoresonator. The radiofrequency performance parameters such as the critical amplitude and dynamic range, which are crucial in the determination of linear operation range of nanoresonators, were maintained at a level comparable to those found under laboratory conditions. This letter brings this technology closer to practical applications in sensors, Alters, and the oscillation of nanoscaled electromechanical devices.

Original languageEnglish
Article number5235126
Pages (from-to)1042-1044
Number of pages3
JournalIEEE Electron Device Letters
Issue number10
Publication statusPublished - 2009 Oct

Bibliographical note

Funding Information:
Manuscript received June 26, 2009. First published September 11, 2009; current version published September 29, 2009. This work was supported in part by Yonsei University under Research Grant 2008-1-0115 and in part by the Samsung Advanced Institute of Technology. The review of this letter was arranged by Editor S.-H. Ryu.

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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