Replication technology for micro/nano optical components

Micro/nano replication processes, including micro/nano thermal forming (compression molding and hot embossing), UV-moldmg, micro injection molding, and glass micro molding are regarded as the most promising mass-production methods for micro/nano optical components because they offer high repeatability, mass producibility with low-cost and versatility in terms of molding material selection. To replicate micro/nano optical components, it is required to prepare the mold inserts that have the cavities of the same shape as the components. One can use any established methods to make mold, such as direct machining, wet etching, dry etching, electroforming, compaction and sintering, and so on. This paper reviews the general issues on mold fabrication and replication technologies for micro/nano optical components with our recent work and results in these areas.