Abstract
UV-moulded microlens arrays with high replication quality were fabricated using a parametric design method. It is important to maximize replication quality because one can obtain replicated micro-optical components with desired properties by accurate control of the shape. In this study, nickel mould inserts for microlens arrays with lenses having diameters between 3 and 230 μm were fabricated by an electroforming process. The reflow method was used to make the master for the metallic mould insert. A UV-moulding system was designed and constructed, and the effects of compression pressure and UV-curing dose on the replication quality of UV-moulded microlens arrays with a diameter of 14 μm were examined experimentally. Finally, geometrical and optical properties of the replicated microlens arrays were measured and analysed.
| Original language | English |
|---|---|
| Pages (from-to) | 2451-2456 |
| Number of pages | 6 |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 36 |
| Issue number | 20 |
| DOIs | |
| Publication status | Published - 2003 Oct 21 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Acoustics and Ultrasonics
- Surfaces, Coatings and Films