Abstract
An experimental method is presented to maximize the replication quality of UV-molded micro-optical components. It is important to maximize the replication quality, because one can obtain the replicated micro-optical components with desired properties by accurate control of the shape. In the present study, a simple technique to avoid micro-air bubbles was first suggested. The effects of the UV-curing dose and the compression pressure on the replication quality of UV-molded structure were examined experimentally. Finally, as a practical application of the process design method, microlens arrays with diameters between 8μm and 230μm were fabricated by the present method, and the replication quality and the optical properties of the replicated micro-lens were measured and analyzed.
| Original language | English |
|---|---|
| Pages (from-to) | 63-69 |
| Number of pages | 7 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4984 |
| DOIs | |
| Publication status | Published - 2003 |
| Event | Micromachining Technology for Micro-optics and Nano-optics - San Jose, CA, United States Duration: 2003 Jan 28 → 2003 Jan 29 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering