Replication of high density optical disc using injection mold with MEMS heater

In this study, an injection mold equipped with a MEMS heater was designed and constructed to raise the stamper surface temperature over the glass transition temperature during the filling stage of the injection molding. First, high density optical disc substrates of ROM and rewritable types with a track pitch of 0.32 μm were replicated by conventional injection molding to analyze the effect of stamper surface temperature on the transcribability. Then the effect of heating on the replication process was simulated numerically. Based on the simulation results, we constructed the MEMS heater using joule heating and a MEMS RTD sensor. Finally, the replication quality of the substrate molded with the MEMS heater was compared with the case without MEMS heating.