Abstract
The preparation of CeO2-SiO2 composite thin films using e-beam evaporation and ion beam assisted deposition was analyzed. It was observed that the refractive index of thin films exhibited a value at 20%-35%SiO2 fraction which leads to high packing density. It was also observed that the composite thin films containing 20%-35%SiO2 concentration had a dense and smooth amorphous surface. The results show that the composite thin films with 20%-35%SiO2 concentration leads to a higher resistance to water absorption.
Original language | English |
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Pages (from-to) | 2048-2051 |
Number of pages | 4 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 22 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2004 Sept |
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films