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Reaction Mechanisms of Non-hydrolytic Atomic Layer Deposition of Al2O3with a Series of Alcohol Oxidants
Seunggi Seo, Whang Je Woo, Yujin Lee, Hwi Yoon, Miso Kim, Il Kwon Oh, Seung Min Chung, Hyungjun Kim, Bonggeun Shong
Research output: Contribution to journal › Article › peer-review
2
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(Scopus)