Rare-earth gate oxides for GaAs MOSFET application

Kwang Ho Kwon, Jun Kyu Yang, Hyung Ho Park, Jongdae Kim, Tae Moon Roh

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


Rare-earth oxide films for gate dielectric on n-GaAs have been investigated. The oxide films were e-beam evaporated on S-passivated GaAs, considering interfacial chemical bonding state and energy band structure. Rare-earth oxides such as Gd 2 O 3 , (Gd x La 1-x ) 2 O 3 , and Gd-silicate were employed due to high resistivity and no chemical reaction with GaAs. Structural and bonding properties were characterized by X-ray photoemission, absorption, and diffraction. The electrical characteristics of metal-oxide-semiconductor (MOS) diodes were correlated with material properties and energy band structures to guarantee the feasibility for MOS field effect transistor (FET) application. Gd 2 O 3 films were grown epitaxially on S-passivated GaAs (0 0 1) at 400 °C. The passivation induced a lowering of crystallization temperature with an epitaxial relationship of Gd 2 O 3 (4 4 0) and GaAs (0 0 1). A better lattice matching relation between Gd 2 O 3 and GaAs substrate was accomplished by the substitution of Gd with La, which has larger ionic radius. The in-plane relationship of (Gd x La 1-x ) 2 O 3 (4 4 0) with GaAs (0 0 1) was found and the epitaxial films showed an improved crystalline quality. Amorphous Gd-silicate film was synthesized by the incorporation of SiO 2 into Gd 2 O 3 . These amorphous Gd-silicate films excluded defect traps or current flow path due to grain boundaries and showed a relatively larger energy band gap dependent on the contents of SiO 2 . Energy band parameters such as ΔE C , ΔE V , and E g were effectively controlled by the film composition.

Original languageEnglish
Pages (from-to)7624-7630
Number of pages7
JournalApplied Surface Science
Issue number21
Publication statusPublished - 2006 Aug 31

Bibliographical note

Funding Information:
This work was supported by Korea Research Foundation Grant (KRF-2004-041-D00431). The experiments at PLS were supported in part by MOST and POSTECH.

All Science Journal Classification (ASJC) codes

  • General Chemistry
  • Condensed Matter Physics
  • General Physics and Astronomy
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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